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  4. CMOS-Compatible Antiferroelectric-Dielectric Capacitors for Multifunctional Energy Storage and Tunable Electronics
 
conference paper

CMOS-Compatible Antiferroelectric-Dielectric Capacitors for Multifunctional Energy Storage and Tunable Electronics

Li, Hung-Wei  
•
Masserey, Cyrille  
•
Martinolli, Niccolo  
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June 29, 2025
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

This work presents a CMOS-compatible multilayer platform integrating energy storage and tunable varactor functionality within a compact system. By co-integrating antiferroelectric (AFE) and dielectric (DE) layers, the design achieves tunability up to 28%, an energy density of 52 J/cm3, and enhanced electrical breakdown strength of 5.8 MV/cm. The proposed architecture enables multifunctionality in a scalable on-chip approach, optimizing both energy efficiency and adaptive electronic applications. This experimental advancement offers a promising foundation for compact, high-performance AFE-based alternative to conventional single-purpose ferroelectric (FE) devices.

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Type
conference paper
DOI
10.1109/transducers61432.2025.11109140
Author(s)
Li, Hung-Wei  

École Polytechnique Fédérale de Lausanne

Masserey, Cyrille  

École Polytechnique Fédérale de Lausanne

Martinolli, Niccolo  

École Polytechnique Fédérale de Lausanne

Stolichnov, Igor  

École Polytechnique Fédérale de Lausanne

Ionescu, Adrian  

École Polytechnique Fédérale de Lausanne

Date Issued

2025-06-29

Publisher

IEEE

Published in
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
ISBN of the book

979-8-3315-1381-8

Start page

1197

End page

1200

Subjects

Antiferroelectric

•

Energy Storage

•

Tunability

•

Varactor

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent acronymEvent placeEvent date
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Orlando, FL, USA

2025-06-29 - 2025-07-03

Available on Infoscience
August 26, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/253536
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