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  4. CMOS-Compatible Antiferroelectric-Dielectric Capacitors for Multifunctional Energy Storage and Tunable Electronics
 
conference paper

CMOS-Compatible Antiferroelectric-Dielectric Capacitors for Multifunctional Energy Storage and Tunable Electronics

Li, Hung-Wei  
•
Masserey, Cyrille  
•
Martinolli, Niccolo  
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June 29, 2025
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

This work presents a CMOS-compatible multilayer platform integrating energy storage and tunable varactor functionality within a compact system. By co-integrating antiferroelectric (AFE) and dielectric (DE) layers, the design achieves tunability up to 28%, an energy density of 52 J/cm3, and enhanced electrical breakdown strength of 5.8 MV/cm. The proposed architecture enables multifunctionality in a scalable on-chip approach, optimizing both energy efficiency and adaptive electronic applications. This experimental advancement offers a promising foundation for compact, high-performance AFE-based alternative to conventional single-purpose ferroelectric (FE) devices.

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