conference paper
Minimized Blurring in Stencil Lithography using a Compliant Membrane
2009
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Type
conference paper
Author(s)
Date Issued
2009
Published in
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
Denver, USA | ||
Available on Infoscience
March 10, 2009
Use this identifier to reference this record