conference paper

Minimized Blurring in Stencil Lithography using a Compliant Membrane

Sidler, K.  
•
Villanueva, G.  
•
Vazquez-Mena, O.  
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2009
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)