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Characterisation and modelling of nitrogen plasmas for the deposition of nanostructured GaN using different plasma sources
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Characterisation and modelling of nitrogen plasmas[...]
-
Martinet, David
- 6202
main
file(s):
EPFL_TH6202
version 1
EPFL_TH6202.pdf
[17.98 MB]
27 Jan 2018, 12:33
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