Characterisation and modelling of nitrogen plasmas for the deposition of nanostructured GaN using different plasma sources


Advisor(s):
Hollenstein, Christoph
Tran, Minh Quang
Year:
2014
Publisher:
Lausanne, EPFL
Keywords:
Other identifiers:
urn: urn:nbn:ch:bel-epfl-thesis6202-1
Laboratories:
SPC
CRPP




 Record created 2014-07-09, last modified 2018-10-07

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