E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection
2003
Details
Title
E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection
Author(s)
Villanueva, G. ; Rius, G. ; Bausells, J. ; Montserrat, J. ; Perez-Murano, F.
Published in
4th Spanish Conference on Electron Devices (CDE)
Pages
495-498
Conference
4th Spanish Conference on Electron Devices (CDE), Calella, 2003
Date
2003
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Work outside EPFL
Published
Posters
Peer-reviewed publications
Work outside EPFL
Published
Posters
Record creation date
2013-08-06