Details
Title
NEMS
Formal Name (French)
Laboratoire de systèmes nano-électromécaniques
Formal Name (English)
Advanced Nano-electromechanical Systems Laboratory
Lab Manager
Stettler, Silvan
Group ID
U12739
Affiliated authors
Abdelaal, Yara
Anderson, Mitchell David
Atakan, Hüseyin Baris
Ayhan, Furkan
Ciressan, Cristian Raul
Conde Rubio, Ana
De Pastina, Annalisa
Dorel, François Louis
Eggli, Séverine
Faizan, Muhammad
Fernández Carnicero, Adrián
Furci, Hernan Fernando
Gamet, Julien
Gamper, Stephan Arthur
Gaudioso, Renato
Gholizadeh, Saba
Hartmann, Florian Fernand
Herle, Dorian Giraud
Howell, Kaitlin
Javerzac-Galy, Clément Christian
Koyaz, Yesim
Küçük, Seniz Esra
Larsen, Tom
Leghziel, Rebecca Camilla
Liffredo, Marco
Lozzi, Andrea
Maillard, Damien
Manzeli, Sajedeh
Martin Olmos, Cristina
Mongardi, Giulia
Monroe, Morgan Mc Kay
Moreno Garcia, Daniel
Parmar, Marsha Mary
Peretti, Federico
Quack, Niels
Quintana Garcia, Ana
Rousset, Vianney
Staehlé-Bouliane, Vivien
Stettler, Silvan
Tang, Hongyu
Villanueva, Guillermo
Vinchhi, Bakul
Vuille-Dit-Bille, Emilie
Xu, Nan
Yandrapalli, Soumya
Anderson, Mitchell David
Atakan, Hüseyin Baris
Ayhan, Furkan
Ciressan, Cristian Raul
Conde Rubio, Ana
De Pastina, Annalisa
Dorel, François Louis
Eggli, Séverine
Faizan, Muhammad
Fernández Carnicero, Adrián
Furci, Hernan Fernando
Gamet, Julien
Gamper, Stephan Arthur
Gaudioso, Renato
Gholizadeh, Saba
Hartmann, Florian Fernand
Herle, Dorian Giraud
Howell, Kaitlin
Javerzac-Galy, Clément Christian
Koyaz, Yesim
Küçük, Seniz Esra
Larsen, Tom
Leghziel, Rebecca Camilla
Liffredo, Marco
Lozzi, Andrea
Maillard, Damien
Manzeli, Sajedeh
Martin Olmos, Cristina
Mongardi, Giulia
Monroe, Morgan Mc Kay
Moreno Garcia, Daniel
Parmar, Marsha Mary
Peretti, Federico
Quack, Niels
Quintana Garcia, Ana
Rousset, Vianney
Staehlé-Bouliane, Vivien
Stettler, Silvan
Tang, Hongyu
Villanueva, Guillermo
Vinchhi, Bakul
Vuille-Dit-Bille, Emilie
Xu, Nan
Yandrapalli, Soumya
Institute
IGM
Faculty
STI
Linked resource
http://nems.epfl.ch/
Publications
Analysis of the blurring in stencil lithography
DRIE and FIB combination for nanotip fabrication
DRIE based novel technique for AFM probes fabrication
Deep reactive ion etching and focused ion beam combination for nanotip fabrication
E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection
FIB and DRIE combination for nanotip fabrication
Nonlinear dynamics in NEMS
Piezoresistive cantilevers for intermolecular force detection
Piezoresistive micro cantilevers for Biomolecular force detection
Suspended microchannel resonators for Biosensing applications
See complete list of publications (334)
DRIE and FIB combination for nanotip fabrication
DRIE based novel technique for AFM probes fabrication
Deep reactive ion etching and focused ion beam combination for nanotip fabrication
E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection
FIB and DRIE combination for nanotip fabrication
Nonlinear dynamics in NEMS
Piezoresistive cantilevers for intermolecular force detection
Piezoresistive micro cantilevers for Biomolecular force detection
Suspended microchannel resonators for Biosensing applications
See complete list of publications (334)
Record appears in
Authorities > Lab