DRIE and FIB combination for nanotip fabrication
2004
Details
Title
DRIE and FIB combination for nanotip fabrication
Author(s)
Villanueva, G. ; Plaza, J. A. ; Sanchez-Amores, A. ; Bausells, J. ; Martinez, E. ; Samitier, J. ; Errachid, A.
Published in
30th International Conference on Micro- and Nano- Engineering (MNE)
Pages
443-446
Conference
30th International Conference on Micro- and Nano- Engineering (MNE), Rotterdam, 2004
Date
2004
Laboratories
NEMS
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Peer-reviewed publications
Work outside EPFL
Published
Posters
Peer-reviewed publications
Work outside EPFL
Published
Posters
Record creation date
2013-08-06