Laser chemical vapor deposition of platinum: conductivity measurements and Schottky diodes
1986
Abstract
Laser chem. vapor deposition (LCVD) of Pt from Pt bishexafluoroacetylacetonate was studied. The elec. cond. of the metallic deposit was investigated as a function of the writing speed, the vapor pressure of the organometallic compd., and the laser power at 458 and 514 nm. The current-voltage characteristics of Schottky diodes made by LCVD of Pt on n-GaAs was compared for 2 different LCVD mechanisms. Suggestions to optimize the LCVD process are given.
Details
Title
Laser chemical vapor deposition of platinum: conductivity measurements and Schottky diodes
Author(s)
Braichotte, D. ; Van den Bergh, H.
Published in
Laser Processing and Diagnostics (II)
Pages
95-99
Conference
Symposium XI, E-MSR Spring meeting on laser processing and diagnostics, Strasbourg, France, June 17th-20th, 1986
Date
1986
Publisher
Les Ulis, Editions de Physique
Keywords
1303-00-0 (Gallium arsenide) Role: USES (Uses) (Schottky diodes from platinum film deposition on); 65353-51-7 Role: RCT (Reactant); RACT (Reactant or reagent) (film deposition of platinum from laser-induced decompn. of); 7440-06-4 (Platinum) Role: PEP (; laser deposition platinum conductor; Schottky diode platinum; cond platinum film; fluoroacetylacetonate platinum laser decompn
Note
Copyright 2003 ACS
CAPLUS
AN 1987:647705
CAN 107:247705
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed.,Lausanne,Switz. FIELD URL:
Conference
56EDAY
written in English.
Process optimization (of laser-assisted deposition of platinum from decompn. of platinum bis(hexafluoroacetylacetonate); Photolysis (of platinum bis(hexafluoroacetylacetonate) in platinum deposition on gallium arsenide); Electric conductivity and conduction (of platinum films, from laser-induced decompn. of platinum bis(hexafluoroacetylacetonate); Diodes (Schottky, platinum-gallium arsenide, from platinum deposition from laser-induced decompn. of platinum bis(hexafluoroacetylacetonate); Electric conductors (film, platinum, from laser-induced decompn. of platinum bis(hexafluoroacetylacetonate)
CAPLUS
AN 1987:647705
CAN 107:247705
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed.,Lausanne,Switz. FIELD URL:
Conference
56EDAY
written in English.
Process optimization (of laser-assisted deposition of platinum from decompn. of platinum bis(hexafluoroacetylacetonate); Photolysis (of platinum bis(hexafluoroacetylacetonate) in platinum deposition on gallium arsenide); Electric conductivity and conduction (of platinum films, from laser-induced decompn. of platinum bis(hexafluoroacetylacetonate); Diodes (Schottky, platinum-gallium arsenide, from platinum deposition from laser-induced decompn. of platinum bis(hexafluoroacetylacetonate); Electric conductors (film, platinum, from laser-induced decompn. of platinum bis(hexafluoroacetylacetonate)
Laboratories
LPAS
Record Appears in
Scientific production and competences > ENAC - School of Architecture, Civil and Environmental Engineering > ENAC Archives > LPAS - Air and Soil Pollution Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2011-02-01