Flexural-Plate-Wave Actuators Based on PZT Thin Film
1997
Details
Title
Flexural-Plate-Wave Actuators Based on PZT Thin Film
Author(s)
Luginbuhl, Ph. ; Collins, S. D. ; Racine, G.-A. ; Grétillat, M.-A. ; de Rooij, N. F. ; Brooks, K. G. ; Setter, N.
Published in
MEMS'97 IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems
Pages
327-332
Date
1997
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12