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Infoscience 43 records found 1 - 10nextlast  jump to record: Search took 0.09 seconds. 
1.
Journal of Micromechanics and Microengineering, 8, 272-278 (1998)
1998 | Journal Articles |
2.
IEEE/LEOS 1996 Summer Topical Meeting Optical MEMS and their applications, 15-16 (1996)
1996 | Conference Papers |
3.
4.
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators, 2, 1093-1096 (1997)
1997 | Conference Papers |
5.
IEEE Micro Electro Mechanical Systems, 97-101 (1994)
1994 | Conference Papers |
6.
14th IEEE Internat. Conf. On Micro Electro Mechanical Systems - Technical Digest, 535-538 (2001)
2001 | Conference Papers |
7.
Symposium Gyro Technology '97, 4.0 - 4.9 (1997)
1997 | Conference Papers |
8.
Sensors and Actuators, B63, 167-177 (2000)
2000 | Journal Articles |
9.
MEMS'97 IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems, 327-332 (1997)
1997 | Conference Papers |
10.
MME'94 Micromechanics Europe Workshop, 137-140 (1994)
1994 | Conference Papers |

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