Influence de l'énergie des ions et de la température de l'objet lors de l'amincissement par bombardement ionique de GaAs

Effect ion energy and object temperature on thinning by ion bombardment of GaAs


Published in:
Helvetica Physica Acta, 61, 853-856
Year:
1988
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 Record created 2007-02-15, last modified 2019-12-05

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