research article
Influence de l'énergie des ions et de la température de l'objet lors de l'amincissement par bombardement ionique de GaAs
Effect ion energy and object temperature on thinning by ion bombardment of GaAs
Type
research article
Author(s)
Date Issued
1988
Published in
Volume
61
Start page
853
End page
856
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
February 15, 2007
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