Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
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Buser, R. A., Brugger, J., & de Rooij, N. F. (1991). Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy. Microelectronic Engineering, 15(1-4), 407–410. https://doi.org/10.1016/0167-9317(91)90252-9
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