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  4. Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
 
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Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

Buser, R.A.
•
Brugger, J.  
•
de Rooij, N.F.  
1991
Microelectronic Engineering

A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

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