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research article
Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
Type
research article
Author(s)
Date Issued
1991
Published in
Volume
15
Issue
1-4
Start page
407
End page
410
Subjects
Note
54
Peer reviewed
REVIEWED
Written at
OTHER
Available on Infoscience
November 2, 2005
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