conference paper
Metal to Glass Anodic Bonding for Microsystems Packaging
2003
Transducers03
Type
conference paper
Author(s)
Date Issued
2003
Published in
Transducers03
Volume
2
Start page
1824
End page
1827
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record