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  4. 1.8-µm pitch, 47-ps jitter SPAD array in a 130 nm SiGe BiCMOS process
 
research article

1.8-µm pitch, 47-ps jitter SPAD array in a 130 nm SiGe BiCMOS process

Liu, Feng  
•
Charbon, Edoardo  
October 21, 2024
Optics Express

We introduce the world’s first SPAD family design in 130 nm SiGe BiCMOS process. At 1.8 µm, we achieved the smallest pitch on record thanks to guard-ring sharing techniques, while keeping a relatively high fill factor of 24.2%. 4×4 SPAD arrays with two parallel selective readout circuits were designed to explore crosstalk and scalability. The SPAD family has a minimum breakdown voltage of 11 V, a maximum PDP of 40.6%, and a typical timing jitter of 47 ps FWHM. The development of silicon SPADs in SiGe process paves the way to Ge-on-Si SPADs for SWIR applications, and to cryogenic optical interfaces for quantum applications.

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Type
research article
DOI
10.1364/OE.533631
Scopus ID

2-s2.0-85207695443

PubMed ID

39573654

Author(s)
Liu, Feng  

École Polytechnique Fédérale de Lausanne

Charbon, Edoardo  

École Polytechnique Fédérale de Lausanne

Date Issued

2024-10-21

Published in
Optics Express
Volume

32

Issue

22

Start page

38004

End page

38012

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
FunderFunding(s)Grant NumberGrant URL

Claudio Bruschini of EPFL

KIST

Available on Infoscience
January 25, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/244196
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