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  4. Interface Losses In Multimaterial Resonators
 
conference paper

Interface Losses In Multimaterial Resonators

Villanueva, L. G.  
•
Amato, B.
•
Larsen, T.
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2014
2014 Ieee 27Th International Conference On Micro Electro Mechanical Systems (Mems)
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize the 81 lowest out-of-plane flexural vibrational modes to achieve a total of more than 3000 experimental points that allow us to quantify the contribution of surface and volume intrinsic (material related) losses in MEMS resonators. We conclude that the losses in the interface between silicon nitride and aluminum is a very important contributor to the overall energy loss.

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Type
conference paper
DOI
10.1109/MEMSYS.2014.6765720
Web of Science ID

WOS:000352217500163

Author(s)
Villanueva, L. G.  
Amato, B.
Larsen, T.
Schmid, S.
Date Issued

2014

Publisher

Ieee

Publisher place

New York

Published in
2014 Ieee 27Th International Conference On Micro Electro Mechanical Systems (Mems)
ISBN of the book

978-1-4799-3508-6

Total of pages

4

Start page

632

End page

635

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent placeEvent date
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

San Francisco, CA, USA

26-30 Jan. 2014

Available on Infoscience
May 29, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/114794
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