Interface Losses In Multimaterial Resonators
We present an extensive study shedding light on the role of surface and bulk losses in micromechanical resonators. We fabricate thin silicon nitride membranes of different sizes and we coat them with different thicknesses of metal. We later characterize the 81 lowest out-of-plane flexural vibrational modes to achieve a total of more than 3000 experimental points that allow us to quantify the contribution of surface and volume intrinsic (material related) losses in MEMS resonators. We conclude that the losses in the interface between silicon nitride and aluminum is a very important contributor to the overall energy loss.
Cite this item
Villanueva, L. G., Amato, B., Larsen, T., & Schmid, S. (2014). Interface Losses In Multimaterial Resonators. 2014 Ieee 27Th International Conference on Micro Electro Mechanical Systems (Mems), 632–635. https://doi.org/10.1109/MEMSYS.2014.6765720
Click Copy to copy the citation, or select the text manually.
MEMS2014-4pages - Q in membranes - v1.1.pdf
Postprint
Accepted version
openaccess
686.95 KB
Adobe PDF
47b6c18498a619ee17aac3cc73a6e462