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  4. Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication
 
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Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication

Kim, Myun-Sik  
•
Osowiecki, Gaël David  
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Scharf, Toralf  
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2012
Proceedings of the EOS Annual Meeting 2012
EOS Annual Meeting 2012, TOM 4 – Micro-Optics
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