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  4. Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication
 
conference paper

Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication

Kim, Myun-Sik  
•
Osowiecki, Gaël David  
•
Scharf, Toralf  
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2012
Proceedings of the EOS Annual Meeting 2012
EOS Annual Meeting 2012, TOM 4 – Micro-Optics
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Type
conference paper
Author(s)
Kim, Myun-Sik  
•
Osowiecki, Gaël David  
•
Scharf, Toralf  
•
Keeler, Ethan
•
Rydberg, Skyler
•
Nakagawa, Wataru
•
Herzig, Hans Peter  
Date Issued

2012

Published in
Proceedings of the EOS Annual Meeting 2012
ISBN of the book

978-3-9815022-4-4

Issue

5996

Subjects

Electron beam lithography (EBL)

•

thermal reflow

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
OPT  
Event nameEvent placeEvent date
EOS Annual Meeting 2012, TOM 4 – Micro-Optics

Aberdeen, Scotland, UK

September 25-28, 2012

Available on Infoscience
October 26, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/86322
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