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  4. Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication
 
conference paper

Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication

Kim, Myun-Sik  
•
Osowiecki, Gaël David  
•
Scharf, Toralf  
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2012
Proceedings of the EOS Annual Meeting 2012
EOS Annual Meeting 2012, TOM 4 – Micro-Optics
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Type
conference paper
Author(s)
Kim, Myun-Sik  
Osowiecki, Gaël David  
Scharf, Toralf  
Keeler, Ethan
Rydberg, Skyler
Nakagawa, Wataru
Herzig, Hans Peter  
Date Issued

2012

Published in
Proceedings of the EOS Annual Meeting 2012
ISBN of the book

978-3-9815022-4-4

Issue

5996

Subjects

Electron beam lithography (EBL)

•

thermal reflow

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
OPT  
Event nameEvent placeEvent date
EOS Annual Meeting 2012, TOM 4 – Micro-Optics

Aberdeen, Scotland, UK

September 25-28, 2012

Available on Infoscience
October 26, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/86322
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