Fabrication process for a microfluidic valve

Luque, A.; Quero, J.M.; Hibert, C.; Fluckiger, P.

doi:10.1109/ISCAS.2003.1206356

conference paper

Fabrication process for a microfluidic valve

Luque, A.

•

Quero, J.M.

•

Hibert, C.

2003

Proceedings of the 2003 International Symposium on Circuits and Systems (ISCAS 2003)

In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.