conference paper
Fabrication process for a microfluidic valve
2003
Proceedings of the 2003 International Symposium on Circuits and Systems (ISCAS 2003)
In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.
Type
conference paper
Author(s)
Date Issued
2003
Published in
Proceedings of the 2003 International Symposium on Circuits and Systems (ISCAS 2003)
Volume
4
Start page
860
End page
863
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Use this identifier to reference this record