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  4. Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%
 
research article

Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Lozzi, Andrea  
•
Yen, Ernest Ting-Ta
•
Muralt, Paul  
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January 1, 2019
IEEE Transactions On Ultrasonics Ferroelectrics And Frequency Control

In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pure aluminum nitride (AlN) CMRs, our results show electromechanical coupling coefficients of more than a 2x factor higher at around 200 MHz. The highest quality factor is measured on a CMR operating at 388 MHz and is in excess of 1600. From the characterization of devices operating at different frequencies, material parameters of the Al0.83Sc0.17N are extracted such as the stiffness constant, the relative permittivity, and the piezoelectric constant. In particular, the reported d(31) piezoelectric constant is equal to -3.9 pm/V. This represents a 2.25x improvement when compared to pure AlN. Finally, we report the first temperature compensation experimental results for Al0.83Sc0.17N CMRs. Our results show that about 1.5 mu m of sputtered oxide, deposited on top of a released resonator, allows near zero temperature coefficient of frequency variation for CMRs operating up to 500 MHz.

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Type
research article
DOI
10.1109/TUFFC.2018.2882073
Web of Science ID

WOS:000457670500016

Author(s)
Lozzi, Andrea  
Yen, Ernest Ting-Ta
Muralt, Paul  
Villanueva, Luis Guillermo  
Date Issued

2019-01-01

Published in
IEEE Transactions On Ultrasonics Ferroelectrics And Frequency Control
Volume

66

Issue

1

Start page

146

End page

153

Subjects

Acoustics

•

Engineering, Electrical & Electronic

•

Engineering

•

aluminum scandium nitride

•

contour-mode resonators (cmrs)

•

electromechanical coupling

•

material properties

•

quality factor

•

temperature compensation

•

piezoelectric response

•

mems resonators

•

enhancement

•

design

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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Available on Infoscience
February 15, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/154481
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