Cite this item

Lozzi, A., Yen, E. T.-T., Muralt, P., & Villanueva, L. G. (2019). Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%. IIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 66(1), 146–153. https://doi.org/10.1109/TUFFC.2018.2882073

Click Copy to copy the citation, or select the text manually.