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  4. Direct fabrication of NEMS by etching through Stencil
 
conference poster not in proceedings

Direct fabrication of NEMS by etching through Stencil

Villanueva, G.  
•
Brugger, J.  
2008
Micro Nano cantilever Sensors 2008 (MNCS 08)

Direct fabrication of NEMS by etching through Stencil

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