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  4. Direct fabrication of NEMS by etching through Stencil
 
conference poster not in proceedings

Direct fabrication of NEMS by etching through Stencil

Villanueva, G.  
•
Brugger, J.  
2008
Micro Nano cantilever Sensors 2008 (MNCS 08)

Direct fabrication of NEMS by etching through Stencil

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Type
conference poster not in proceedings
Author(s)
Villanueva, G.  
Brugger, J.  
Date Issued

2008

Written at

EPFL

EPFL units
NEMS  
LMIS1  
Event nameEvent placeEvent date
Micro Nano cantilever Sensors 2008 (MNCS 08)

Mainz, Germany

May 19-21, 2008

Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/26045
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