conference paper

Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps

Badila, N.-D.  
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Hibert, C.  
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Mazza, M.  
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2007
Microsystem Technologies
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006