conference paper
Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps
2007
Microsystem Technologies
Type
conference paper
Web of Science ID
WOS:000245806000036
Author(s)
Date Issued
2007
Published in
Microsystem Technologies
Volume
13
Issue
11-12
Start page
1489
End page
1493
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Stresa, Italy | April 2006 | |
Available on Infoscience
May 16, 2007
Use this identifier to reference this record