Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Suspended micro/nano channel resonators: a review
 
review article

Suspended micro/nano channel resonators: a review

De Pastina, Annalisa  
•
Villanueva, Luis Guillermo  
April 1, 2020
Journal Of Micromechanics And Microengineering

Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the study of biological processes, suspended microchannel resonators (SMRs) have been developed. SMRs are hollow devices allowing for fluidic confinement inside the body of the resonator, which can thus be kept in dry environment or encapsulated in vacuum. Analyte binding and flowthrough experiments can be performed, these latter enabling single-cell analysis. In this paper, we survey the progress of over the past 20 years in the field of SMRs. We review the main fabrication, transduction and packaging strategies. We also provide an insight into the working principle of the sensors and their applications to microfluidics and biology.

  • Files
  • Details
  • Metrics
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés