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review article

Suspended micro/nano channel resonators: a review

De Pastina, Annalisa  
•
Villanueva, Luis Guillermo  
April 1, 2020
Journal Of Micromechanics And Microengineering

Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the study of biological processes, suspended microchannel resonators (SMRs) have been developed. SMRs are hollow devices allowing for fluidic confinement inside the body of the resonator, which can thus be kept in dry environment or encapsulated in vacuum. Analyte binding and flowthrough experiments can be performed, these latter enabling single-cell analysis. In this paper, we survey the progress of over the past 20 years in the field of SMRs. We review the main fabrication, transduction and packaging strategies. We also provide an insight into the working principle of the sensors and their applications to microfluidics and biology.

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Type
review article
DOI
10.1088/1361-6439/ab6df1
Web of Science ID

WOS:000537455700001

Author(s)
De Pastina, Annalisa  
Villanueva, Luis Guillermo  
Date Issued

2020-04-01

Published in
Journal Of Micromechanics And Microengineering
Volume

30

Issue

4

Article Number

043001

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Physics

•

micro channel resonators

•

nano channel resonators

•

resonators

•

acoustic-wave biosensors

•

microchannel resonators

•

cancer-cells

•

mass sensor

•

single cells

•

density

•

volume

•

growth

•

microresonators

•

nanoparticles

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
June 18, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/169398
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