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Academic and Research Output
Journal articles
Advanced deep reactive ion etching: a versatile tool for micromechanical systems
research article
Advanced deep reactive ion etching: a versatile tool for micromechanical systems
Clerc, P.-A.
•
Dellmann, L.
•
Grétillat, F.
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1998
Journal of Micromechanics and Microengineering
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