research article
Advanced deep reactive ion etching: a versatile tool for micromechanical systems
Type
research article
Author(s)
Clerc, P.-A.
Dellmann, L.
Grétillat, F.
Grétillat, M.-A.
Indermühle, P.-F.
Jeanneret, S.
Luginbuhl, Ph.
Marxer, C.
Pfeffer, T.
Racine, G.-A.
Date Issued
1998
Published in
Volume
8
Start page
272
End page
278
Note
191
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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