conference paper
Fabrication process and model for a MEMS parallel-plate capacitor above CPW line
2004
MEMSWAVE 2004, 5th workshop on MEMS for millimeterwave communication
Type
conference paper
Date Issued
2004
Published in
MEMSWAVE 2004, 5th workshop on MEMS for millimeterwave communication
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Uppsala, Sweden | June 30-July 2, 2004 | |
Use this identifier to reference this record