Fabrication process and model for a MEMS parallel-plate capacitor above CPW line

Perruisseau-Carrier, J.; Fritschi, R.; Crespo Valero, P.; Hibert, C.; Zürcher, J.-F.; Flückiger, Ph.; Skrivervik, A.; Ionescu, A. M.

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conference paper

Fabrication process and model for a MEMS parallel-plate capacitor above CPW line

Perruisseau-Carrier, J.

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Fritschi, R.

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Crespo Valero, P.

2004

MEMSWAVE 2004, 5th workshop on MEMS for millimeterwave communication

5th workshop on MEMS for millimeterwave communication (MEMSWAVE2004)