conference paper

Fabrication process and model for a MEMS parallel-plate capacitor above CPW line

Perruisseau-Carrier, J.  
•
Fritschi, R.  
•
Crespo Valero, P.  
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2004
MEMSWAVE 2004, 5th workshop on MEMS for millimeterwave communication
5th workshop on MEMS for millimeterwave communication (MEMSWAVE2004)
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