conference paper
Fabrication technologies for micro-optical elements with arbitrary surfaces
2000
Micromachining Technology for Micro-Optics
Type
conference paper
Author(s)
Date Issued
2000
Published in
Micromachining Technology for Micro-Optics
Series title/Series vol.
Proc. SPIE; 4179
Start page
65
End page
72
Subjects
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record