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conference paper
Fabrication technologies for micro-optical elements with arbitrary surfaces
2000
Micromachining Technology for Micro-Optics
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Name
SPIE4179_00 BeamShaping.PDF
Access type
openaccess
Size
2.33 MB
Format
Adobe PDF
Checksum (MD5)
d07f5f565076be35be5ab1b7b508d3cd