Characterization of PZT thin films for micromotors

Piezoelectric membranes consisting of sputter deposited PbZrXTi1-XO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and de-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d(31)approximate to 40 pm/V). The latter was also derived from the quasi-static deflections.


Publié dans:
Microelectronic Engineering, 29, 1-4, 67-70
Année
1995
Publisher:
Elsevier
ISSN:
0167-9317
Note:
Muralt, P Ecole Polytech Fed Lausanne,Lab Ceram,Mx-D Ecublens,Ch-1015 Lausanne,Switzerland, Tp608, Times Cited:17, Cited References Count:12
Laboratoires:




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