research article
Characterization of PZT thin films for micromotors
Piezoelectric membranes consisting of sputter deposited PbZrXTi1-XO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and de-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d(31)approximate to 40 pm/V). The latter was also derived from the quasi-static deflections.
Type
research article
Web of Science ID
WOS:A1995TP60800012
Author(s)
Date Issued
1995
Publisher
Published in
Volume
29
Issue
1-4
Start page
67
End page
70
Note
Muralt, P Ecole Polytech Fed Lausanne,Lab Ceram,Mx-D Ecublens,Ch-1015 Lausanne,Switzerland, Tp608, Times Cited:17, Cited References Count:12
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
August 21, 2006
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