3-D structuration of LTCC for Sensor Micro-fluidic Applications

Low Temperature Co-fired Ceramic (LTCC) Technology is recentlyaddressed to be a key approach among advanced packaging technologies, offering many advantages over its competitors. One of its most attractivefeatures is the ease of 3-D structuration thanks to the LTCC green tapes. These tapes can be easily cut into desired forms in the way to realize bothstructural and electrical functions under a single system. Three dimensional structures such as membranes, channels can be achieved either by cuttingand laminating LTCC tapes or by using a sacrificial layer. In this work, we demonstrate fabrication of an LTCC micro-fluidic sensor using carbon-paste as the sacrificial layer. The results indicate extremely fine-sized structural dimensions without deformation, which are attractive for pressureor thermal sensor applications.


Published in:
European Microelectronics and Packaging Symposium - IMAPS, 366-371
Presented at:
European Microelectronics and Packaging Symposium, Prague (CZ)
Year:
2004
Keywords:
Note:
Structuration du LTCC en 3D, en utilisant une couche sacrificielle de carbone qui brûle à la cuisson du LTCC. On peut réaliser des membranes et des canaux de façon très fiable, sans les problèmes aux bords observés avec une couche intermédiaire découpée.
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 Record created 2006-06-22, last modified 2018-01-27

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