High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates


Published in:
Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Presented at:
DTIP 2006, Stresa, Italy, April 2006
Year:
2006
Other identifiers:
DAR: 11993
Laboratories:




 Record created 2006-05-10, last modified 2018-03-18


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