conference paper
High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates
2007
Microsystem Technologies
Type
conference paper
Author(s)
Date Issued
2007
Published in
Microsystem Technologies
Volume
13
Issue
11-12
Start page
1483
End page
1487
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
Stresa, Italy | April 2006 | |
Available on Infoscience
May 10, 2006
Use this identifier to reference this record