AFM imaging with an xy-micropositioner with integrated tip

We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first time with a such a microtool, an atomic force microscope (AFM) profile has been achieved.


Published in:
Sensors and Actuators A, 46-47, 562-565
Year:
1995
Laboratories:




 Record created 2005-11-02, last modified 2018-03-18

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