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research article

AFM imaging with an xy-micropositioner with integrated tip

Indermühle, P.-F.
•
Jaecklin, V. P.
•
Brugger, J  
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1995
Sensors and Actuators A: Physical

We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first time with a such a microtool, an atomic force microscope (AFM) profile has been achieved.

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Type
research article
DOI
10.1016/0924-4247(94)00962-H
Author(s)
Indermühle, P.-F.
•
Jaecklin, V. P.
•
Brugger, J  
•
Linder, C
•
de Rooij, N F  
•
Binggeli, M.
Date Issued

1995

Published in
Sensors and Actuators A: Physical
Volume

46-47

Start page

562

End page

565

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LMIS1  
SAMLAB  
Available on Infoscience
November 2, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/218594
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