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research article
AFM imaging with an xy-micropositioner with integrated tip
We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first time with a such a microtool, an atomic force microscope (AFM) profile has been achieved.
Type
research article
Author(s)
Date Issued
1995
Published in
Volume
46-47
Start page
562
End page
565
Peer reviewed
REVIEWED
Written at
OTHER
Available on Infoscience
November 2, 2005
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