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  4. Micromachined silicon cantilevers and tips for bidirectional force microscopy
 
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Micromachined silicon cantilevers and tips for bidirectional force microscopy

Buser, R. A.
•
Brugger, J.  
•
de Rooij, N. F.  
1992
Ultramicroscopy

A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

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Buser_1992_UM.pdf

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