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  4. Micromachined silicon cantilevers and tips for bidirectional force microscopy
 
research article

Micromachined silicon cantilevers and tips for bidirectional force microscopy

Buser, R. A.
•
Brugger, J.  
•
de Rooij, N. F.  
1992
Ultramicroscopy

A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

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Type
research article
DOI
10.1016/0304-3991(92)90469-Z
Author(s)
Buser, R. A.
•
Brugger, J.  
•
de Rooij, N. F.  
Date Issued

1992

Published in
Ultramicroscopy
Volume

42-44

Start page

1476

End page

1480

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LMIS1  
SAMLAB  
Available on Infoscience
November 2, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/218589
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