research article
Micromachined silicon cantilevers and tips for bidirectional force microscopy
1992
A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
Type
research article
Author(s)
Date Issued
1992
Published in
Volume
42-44
Start page
1476
End page
1480
Peer reviewed
REVIEWED
Written at
OTHER
Available on Infoscience
November 2, 2005
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