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Nano-replication of diffractive optical elements in sol-gel derived glasses

Parashar, V.K. ; Sayah, A. ; Pfeffer, M. ; Schoch, F.[...]

Published in:
Microelectronic Engineering, 67-68, 710-719
Year:
2003
DOI:
10.1016/S0167-9317(03)00132-1
Other identifiers:
View record in Web of Science
Laboratories:
LMIS2

Record appears in:
Scientific production and competences > STI - School of Engineering > IMT - Institute of Microengineering > LMIS2 - Microsystems Laboratory 2
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published



 Record created 2005-10-26, last modified 2018-03-17


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