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research article

Nano-replication of diffractive optical elements in sol-gel derived glasses

Parashar, V.K.  
•
Sayah, A.  
•
Pfeffer, M.
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2003
Microelectronic Engineering
  • Details
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Type
research article
DOI
10.1016/S0167-9317(03)00132-1
Web of Science ID

WOS:000183842100098

Author(s)
Parashar, V.K.  
Sayah, A.  
Pfeffer, M.
Schoch, F.
Gobrecht, J.
Gijs, M.A.M.  
Date Issued

2003

Published in
Microelectronic Engineering
Volume

67-68

Start page

710

End page

719

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS2  
Available on Infoscience
October 26, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/218326
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