Nano-replication of diffractive optical elements in sol-gel derived glasses

• Published in: Microelectronic Engineering, vol. 67-68, p. 710-719
• Publication date: 2003

Reference

• LMIS2-ARTICLE-2003-002
• doi:10.1016/S0167-9317(03)00132-1
• View record in Web of Science

Record created on 2005-10-26, modified on 2017-05-10